5/25/2011	10:55:52 AM	SiCl4 post valve opened
5/25/2011	10:57:35 AM	Helium valve opened
5/25/2011	10:57:39 AM	Helium MFC set to  500.000000
5/25/2011	10:59:06 AM	SiCl4 pre valve opened
5/25/2011	10:59:15 AM	SiCl4 MFC set to  100.000000
5/25/2011	11:02:01 AM	Helium valve closed
5/25/2011	11:02:07 AM	SiCl4 MFC set to  0.000000
5/25/2011	11:02:08 AM	SiCl4 pre valve closed
5/25/2011	11:02:11 AM	SiCl4 post valve closed
5/25/2011	11:04:00 AM	Bypass valve closed
5/25/2011	11:04:00 AM	Main Vac valve closed
5/25/2011	11:23:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2011	11:23:22 AM	Recipe started at 11:23 AM
5/25/2011	11:23:22 AM	Helium valve closed
5/25/2011	11:23:22 AM	H2 valve closed
5/25/2011	11:23:22 AM	BCl3 valve closed
5/25/2011	11:23:22 AM	PH3 valve closed
5/25/2011	11:23:22 AM	SiCl4 pre valve closed
5/25/2011	11:23:22 AM	SiCl4 post valve closed
5/25/2011	11:23:22 AM	Main Vac valve closed
5/25/2011	11:23:22 AM	Bubbler valve closed
5/25/2011	11:23:22 AM	Bypass valve opened
5/25/2011	11:23:22 AM	Helium MFC set to  0.000000
5/25/2011	11:23:22 AM	H2 MFC set to  0.000000
5/25/2011	11:23:22 AM	BCl3 MFC set to  0.000000
5/25/2011	11:23:22 AM	PHl3 MFC set to  0.000000
5/25/2011	11:23:22 AM	SiCl4 MFC set to  0.000000
5/25/2011	11:23:22 AM	Bypass solenoid MFC set to  0.000000
5/25/2011	11:23:22 AM	Tube furnace set to 0
5/25/2011	11:24:04 AM	Helium valve closed
5/25/2011	11:24:04 AM	H2 valve closed
5/25/2011	11:24:04 AM	BCl3 valve closed
5/25/2011	11:24:04 AM	PH3 valve closed
5/25/2011	11:24:04 AM	SiCl4 pre valve closed
5/25/2011	11:24:04 AM	SiCl4 post valve closed
5/25/2011	11:24:04 AM	Bubbler valve closed
5/25/2011	11:24:04 AM	Main Vac valve opened
5/25/2011	11:24:04 AM	Bypass valve opened
5/25/2011	11:24:04 AM	Helium MFC set to  0.000000
5/25/2011	11:24:04 AM	H2 MFC set to  0.000000
5/25/2011	11:24:04 AM	BCl3 MFC set to  0.000000
5/25/2011	11:24:04 AM	PHl3 MFC set to  0.000000
5/25/2011	11:24:04 AM	SiCl4 MFC set to  0.000000
5/25/2011	11:24:04 AM	Bypass solenoid MFC set to  0.000000
5/25/2011	11:24:04 AM	Tube furnace set to 0
5/25/2011	11:24:05 AM	Run finished at 11:24 AM
5/25/2011	11:24:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2011	11:24:41 AM	Helium valve opened
5/25/2011	11:24:45 AM	Helium MFC set to  500.000000
5/25/2011	11:25:10 AM	SiCl4 post valve opened
5/25/2011	11:25:26 AM	SiCl4 MFC set to  100.000000
5/25/2011	11:25:28 AM	SiCl4 pre valve opened
5/25/2011	2:31:02 PM	Bypass valve closed
5/25/2011	2:31:03 PM	Main Vac valve closed
5/25/2011	2:34:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/25/2011	2:34:42 PM	Recipe started at 2:34 PM
5/25/2011	2:34:42 PM	Helium valve closed
5/25/2011	2:34:42 PM	H2 valve closed
5/25/2011	2:34:42 PM	BCl3 valve closed
5/25/2011	2:34:42 PM	PH3 valve closed
5/25/2011	2:34:42 PM	SiCl4 pre valve closed
5/25/2011	2:34:42 PM	SiCl4 post valve closed
5/25/2011	2:34:42 PM	Main Vac valve closed
5/25/2011	2:34:42 PM	Bypass valve closed
5/25/2011	2:34:42 PM	Bubbler valve closed
5/25/2011	2:34:42 PM	Helium MFC set to  0.000000
5/25/2011	2:34:42 PM	H2 MFC set to  0.000000
5/25/2011	2:34:42 PM	BCl3 MFC set to  0.000000
5/25/2011	2:34:42 PM	PHl3 MFC set to  0.000000
5/25/2011	2:34:42 PM	SiCl4 MFC set to  0.000000
5/25/2011	2:34:42 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	2:34:42 PM	Tube furnace set to 0
5/25/2011	2:34:43 PM	Run finished at 2:34 PM
5/25/2011	2:34:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/25/2011	2:35:16 PM	Helium MFC set to  500.000000
5/25/2011	2:35:18 PM	Helium valve opened
5/25/2011	2:36:24 PM	Helium valve closed
5/25/2011	2:36:54 PM	Helium valve opened
5/25/2011	2:37:15 PM	Bypass valve opened
5/25/2011	2:37:15 PM	Bypass valve closed
5/25/2011	2:37:20 PM	Bypass valve opened
5/25/2011	2:37:20 PM	Bypass valve closed
5/25/2011	2:37:26 PM	Bypass valve opened
5/25/2011	2:37:26 PM	Bypass valve closed
5/25/2011	2:37:37 PM	Bypass valve opened
5/25/2011	2:37:37 PM	Bypass valve closed
5/25/2011	2:37:39 PM	Bypass valve opened
5/25/2011	2:37:40 PM	Bypass valve closed
5/25/2011	2:37:42 PM	Bypass valve opened
5/25/2011	2:37:42 PM	Bypass valve closed
5/25/2011	2:37:51 PM	Bypass valve opened
5/25/2011	2:37:51 PM	Bypass valve closed
5/25/2011	2:37:54 PM	Bypass valve opened
5/25/2011	2:37:54 PM	Bypass valve closed
5/25/2011	2:38:11 PM	SiCl4 post valve opened
5/25/2011	2:38:12 PM	SiCl4 pre valve opened
5/25/2011	2:38:16 PM	SiCl4 MFC set to  100.000000
5/25/2011	2:39:39 PM	SiCl4 pre valve closed
5/25/2011	2:39:57 PM	SiCl4 post valve closed
5/25/2011	2:43:48 PM	Helium valve closed
5/25/2011	2:44:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2011	2:44:02 PM	Recipe started at 2:44 PM
5/25/2011	2:44:02 PM	Helium valve closed
5/25/2011	2:44:02 PM	H2 valve closed
5/25/2011	2:44:02 PM	BCl3 valve closed
5/25/2011	2:44:02 PM	PH3 valve closed
5/25/2011	2:44:02 PM	SiCl4 pre valve closed
5/25/2011	2:44:02 PM	SiCl4 post valve closed
5/25/2011	2:44:02 PM	Main Vac valve closed
5/25/2011	2:44:02 PM	Bubbler valve closed
5/25/2011	2:44:02 PM	Bypass valve opened
5/25/2011	2:44:02 PM	Helium MFC set to  0.000000
5/25/2011	2:44:02 PM	H2 MFC set to  0.000000
5/25/2011	2:44:02 PM	BCl3 MFC set to  0.000000
5/25/2011	2:44:02 PM	PHl3 MFC set to  0.000000
5/25/2011	2:44:02 PM	SiCl4 MFC set to  0.000000
5/25/2011	2:44:02 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	2:44:02 PM	Tube furnace set to 0
5/25/2011	2:44:33 PM	Helium valve closed
5/25/2011	2:44:33 PM	H2 valve closed
5/25/2011	2:44:33 PM	BCl3 valve closed
5/25/2011	2:44:33 PM	PH3 valve closed
5/25/2011	2:44:33 PM	SiCl4 pre valve closed
5/25/2011	2:44:33 PM	SiCl4 post valve closed
5/25/2011	2:44:33 PM	Bubbler valve closed
5/25/2011	2:44:33 PM	Main Vac valve opened
5/25/2011	2:44:33 PM	Bypass valve opened
5/25/2011	2:44:33 PM	Helium MFC set to  0.000000
5/25/2011	2:44:33 PM	H2 MFC set to  0.000000
5/25/2011	2:44:33 PM	BCl3 MFC set to  0.000000
5/25/2011	2:44:33 PM	PHl3 MFC set to  0.000000
5/25/2011	2:44:33 PM	SiCl4 MFC set to  0.000000
5/25/2011	2:44:33 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	2:44:33 PM	Tube furnace set to 0
5/25/2011	2:44:33 PM	Run finished at 2:44 PM
5/25/2011	2:44:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2011	2:53:29 PM	Recipe started at 2:53 PM
5/25/2011	2:53:29 PM	Helium valve closed
5/25/2011	2:53:29 PM	BCl3 valve closed
5/25/2011	2:53:29 PM	PH3 valve closed
5/25/2011	2:53:29 PM	SiCl4 pre valve closed
5/25/2011	2:53:29 PM	SiCl4 post valve closed
5/25/2011	2:53:29 PM	Main Vac valve closed
5/25/2011	2:53:29 PM	Bypass valve closed
5/25/2011	2:53:29 PM	Bubbler valve closed
5/25/2011	2:53:29 PM	H2 valve opened
5/25/2011	2:53:29 PM	Helium MFC set to  0.000000
5/25/2011	2:53:29 PM	H2 MFC set to  500.000000
5/25/2011	2:53:29 PM	BCl3 MFC set to  0.000000
5/25/2011	2:53:29 PM	PHl3 MFC set to  0.000000
5/25/2011	2:53:29 PM	SiCl4 MFC set to  0.000000
5/25/2011	2:53:29 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	2:53:30 PM	Tube furnace set to 0
5/25/2011	2:54:54 PM	Helium valve closed
5/25/2011	2:54:54 PM	BCl3 valve closed
5/25/2011	2:54:54 PM	PH3 valve closed
5/25/2011	2:54:54 PM	SiCl4 pre valve closed
5/25/2011	2:54:54 PM	SiCl4 post valve closed
5/25/2011	2:54:54 PM	Main Vac valve closed
5/25/2011	2:54:54 PM	Bypass valve closed
5/25/2011	2:54:54 PM	H2 valve opened
5/25/2011	2:54:54 PM	Bubbler valve opened
5/25/2011	2:54:54 PM	Helium MFC set to  0.000000
5/25/2011	2:54:54 PM	H2 MFC set to  500.000000
5/25/2011	2:54:54 PM	BCl3 MFC set to  0.000000
5/25/2011	2:54:54 PM	PHl3 MFC set to  0.000000
5/25/2011	2:54:54 PM	SiCl4 MFC set to  0.000000
5/25/2011	2:54:54 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	2:54:54 PM	Tube furnace set to 1000
5/25/2011	3:09:54 PM	Helium valve closed
5/25/2011	3:09:54 PM	BCl3 valve closed
5/25/2011	3:09:54 PM	PH3 valve closed
5/25/2011	3:09:54 PM	Main Vac valve closed
5/25/2011	3:09:54 PM	Bypass valve closed
5/25/2011	3:09:54 PM	H2 valve opened
5/25/2011	3:09:54 PM	SiCl4 pre valve opened
5/25/2011	3:09:54 PM	SiCl4 post valve opened
5/25/2011	3:09:54 PM	Bubbler valve opened
5/25/2011	3:09:54 PM	Helium MFC set to  0.000000
5/25/2011	3:09:54 PM	H2 MFC set to  500.000000
5/25/2011	3:09:54 PM	BCl3 MFC set to  0.000000
5/25/2011	3:09:54 PM	PHl3 MFC set to  0.000000
5/25/2011	3:09:54 PM	SiCl4 MFC set to  50.000000
5/25/2011	3:09:54 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	3:09:54 PM	Tube furnace set to 1000
5/25/2011	7:09:54 PM	H2 valve closed
5/25/2011	7:09:54 PM	BCl3 valve closed
5/25/2011	7:09:54 PM	PH3 valve closed
5/25/2011	7:09:54 PM	SiCl4 pre valve closed
5/25/2011	7:09:54 PM	SiCl4 post valve closed
5/25/2011	7:09:54 PM	Main Vac valve closed
5/25/2011	7:09:54 PM	Bypass valve closed
5/25/2011	7:09:54 PM	Helium valve opened
5/25/2011	7:09:54 PM	Bubbler valve opened
5/25/2011	7:09:54 PM	Helium MFC set to  500.000000
5/25/2011	7:09:54 PM	H2 MFC set to  0.000000
5/25/2011	7:09:54 PM	BCl3 MFC set to  0.000000
5/25/2011	7:09:54 PM	PHl3 MFC set to  0.000000
5/25/2011	7:09:54 PM	SiCl4 MFC set to  0.000000
5/25/2011	7:09:54 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	7:09:54 PM	Tube furnace set to 0
5/25/2011	7:29:54 PM	Helium valve closed
5/25/2011	7:29:54 PM	H2 valve closed
5/25/2011	7:29:54 PM	BCl3 valve closed
5/25/2011	7:29:54 PM	PH3 valve closed
5/25/2011	7:29:54 PM	SiCl4 pre valve closed
5/25/2011	7:29:54 PM	SiCl4 post valve closed
5/25/2011	7:29:54 PM	Main Vac valve closed
5/25/2011	7:29:54 PM	Bypass valve closed
5/25/2011	7:29:54 PM	Bubbler valve closed
5/25/2011	7:29:54 PM	Helium MFC set to  0.000000
5/25/2011	7:29:54 PM	H2 MFC set to  0.000000
5/25/2011	7:29:54 PM	BCl3 MFC set to  0.000000
5/25/2011	7:29:54 PM	PHl3 MFC set to  0.000000
5/25/2011	7:29:54 PM	SiCl4 MFC set to  0.000000
5/25/2011	7:29:54 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	7:29:54 PM	Tube furnace set to 0
5/25/2011	7:29:54 PM	Run finished at 7:29 PM
5/25/2011	8:57:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2011	8:57:46 PM	Recipe started at 8:57 PM
5/25/2011	8:57:46 PM	Helium valve closed
5/25/2011	8:57:46 PM	H2 valve closed
5/25/2011	8:57:46 PM	BCl3 valve closed
5/25/2011	8:57:46 PM	PH3 valve closed
5/25/2011	8:57:46 PM	SiCl4 pre valve closed
5/25/2011	8:57:46 PM	SiCl4 post valve closed
5/25/2011	8:57:46 PM	Main Vac valve closed
5/25/2011	8:57:46 PM	Bubbler valve closed
5/25/2011	8:57:46 PM	Bypass valve opened
5/25/2011	8:57:46 PM	Helium MFC set to  0.000000
5/25/2011	8:57:46 PM	H2 MFC set to  0.000000
5/25/2011	8:57:46 PM	BCl3 MFC set to  0.000000
5/25/2011	8:57:46 PM	PHl3 MFC set to  0.000000
5/25/2011	8:57:46 PM	SiCl4 MFC set to  0.000000
5/25/2011	8:57:46 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	8:57:46 PM	Tube furnace set to 0
5/25/2011	8:58:10 PM	Helium valve closed
5/25/2011	8:58:10 PM	H2 valve closed
5/25/2011	8:58:10 PM	BCl3 valve closed
5/25/2011	8:58:10 PM	PH3 valve closed
5/25/2011	8:58:10 PM	SiCl4 pre valve closed
5/25/2011	8:58:10 PM	SiCl4 post valve closed
5/25/2011	8:58:10 PM	Bubbler valve closed
5/25/2011	8:58:10 PM	Main Vac valve opened
5/25/2011	8:58:10 PM	Bypass valve opened
5/25/2011	8:58:10 PM	Helium MFC set to  0.000000
5/25/2011	8:58:10 PM	H2 MFC set to  0.000000
5/25/2011	8:58:10 PM	BCl3 MFC set to  0.000000
5/25/2011	8:58:10 PM	PHl3 MFC set to  0.000000
5/25/2011	8:58:10 PM	SiCl4 MFC set to  0.000000
5/25/2011	8:58:10 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	8:58:10 PM	Tube furnace set to 0
5/25/2011	8:58:10 PM	Run finished at 8:58 PM
5/25/2011	8:58:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2011	9:14:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2011	9:14:25 PM	Recipe started at 9:14 PM
5/25/2011	9:14:25 PM	H2 valve closed
5/25/2011	9:14:25 PM	BCl3 valve closed
5/25/2011	9:14:25 PM	PH3 valve closed
5/25/2011	9:14:25 PM	SiCl4 pre valve closed
5/25/2011	9:14:25 PM	SiCl4 post valve closed
5/25/2011	9:14:25 PM	Main Vac valve closed
5/25/2011	9:14:25 PM	Bypass valve closed
5/25/2011	9:14:25 PM	Bubbler valve closed
5/25/2011	9:14:25 PM	Helium valve opened
5/25/2011	9:14:25 PM	Helium MFC set to  500.000000
5/25/2011	9:14:25 PM	H2 MFC set to  0.000000
5/25/2011	9:14:25 PM	BCl3 MFC set to  0.000000
5/25/2011	9:14:25 PM	PHl3 MFC set to  0.000000
5/25/2011	9:14:25 PM	SiCl4 MFC set to  0.000000
5/25/2011	9:14:25 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	9:14:25 PM	Tube furnace set to 0
5/25/2011	9:15:45 PM	Helium valve closed
5/25/2011	9:15:45 PM	H2 valve closed
5/25/2011	9:15:45 PM	BCl3 valve closed
5/25/2011	9:15:45 PM	PH3 valve closed
5/25/2011	9:15:45 PM	SiCl4 pre valve closed
5/25/2011	9:15:45 PM	SiCl4 post valve closed
5/25/2011	9:15:45 PM	Main Vac valve closed
5/25/2011	9:15:45 PM	Bypass valve closed
5/25/2011	9:15:45 PM	Bubbler valve closed
5/25/2011	9:15:45 PM	Helium MFC set to  0.000000
5/25/2011	9:15:45 PM	H2 MFC set to  0.000000
5/25/2011	9:15:45 PM	BCl3 MFC set to  0.000000
5/25/2011	9:15:45 PM	PHl3 MFC set to  0.000000
5/25/2011	9:15:45 PM	SiCl4 MFC set to  0.000000
5/25/2011	9:15:45 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	9:15:45 PM	Tube furnace set to 0
5/25/2011	9:15:45 PM	Run finished at 9:15 PM
5/25/2011	9:15:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2011	9:18:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2011	9:18:48 PM	Recipe started at 9:18 PM
5/25/2011	9:18:48 PM	Helium valve closed
5/25/2011	9:18:48 PM	H2 valve closed
5/25/2011	9:18:48 PM	BCl3 valve closed
5/25/2011	9:18:48 PM	PH3 valve closed
5/25/2011	9:18:48 PM	SiCl4 pre valve closed
5/25/2011	9:18:48 PM	SiCl4 post valve closed
5/25/2011	9:18:48 PM	Main Vac valve closed
5/25/2011	9:18:48 PM	Bubbler valve closed
5/25/2011	9:18:48 PM	Bypass valve opened
5/25/2011	9:18:48 PM	Helium MFC set to  0.000000
5/25/2011	9:18:48 PM	H2 MFC set to  0.000000
5/25/2011	9:18:48 PM	BCl3 MFC set to  0.000000
5/25/2011	9:18:48 PM	PHl3 MFC set to  0.000000
5/25/2011	9:18:48 PM	SiCl4 MFC set to  0.000000
5/25/2011	9:18:48 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	9:18:49 PM	Tube furnace set to 0
5/25/2011	9:19:21 PM	Helium valve closed
5/25/2011	9:19:21 PM	H2 valve closed
5/25/2011	9:19:21 PM	BCl3 valve closed
5/25/2011	9:19:21 PM	PH3 valve closed
5/25/2011	9:19:21 PM	SiCl4 pre valve closed
5/25/2011	9:19:21 PM	SiCl4 post valve closed
5/25/2011	9:19:21 PM	Bubbler valve closed
5/25/2011	9:19:21 PM	Main Vac valve opened
5/25/2011	9:19:21 PM	Bypass valve opened
5/25/2011	9:19:21 PM	Helium MFC set to  0.000000
5/25/2011	9:19:21 PM	H2 MFC set to  0.000000
5/25/2011	9:19:21 PM	BCl3 MFC set to  0.000000
5/25/2011	9:19:21 PM	PHl3 MFC set to  0.000000
5/25/2011	9:19:21 PM	SiCl4 MFC set to  0.000000
5/25/2011	9:19:21 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	9:19:21 PM	Tube furnace set to 0
5/25/2011	9:19:21 PM	Run finished at 9:19 PM
5/25/2011	9:19:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2011	10:02:25 PM	Helium valve opened
5/25/2011	10:02:25 PM	Helium valve closed
5/25/2011	10:07:27 PM	Recipe started at 10:07 PM
5/25/2011	10:07:27 PM	Helium valve closed
5/25/2011	10:07:27 PM	BCl3 valve closed
5/25/2011	10:07:27 PM	PH3 valve closed
5/25/2011	10:07:27 PM	SiCl4 pre valve closed
5/25/2011	10:07:27 PM	SiCl4 post valve closed
5/25/2011	10:07:27 PM	Main Vac valve closed
5/25/2011	10:07:27 PM	Bypass valve closed
5/25/2011	10:07:27 PM	Bubbler valve closed
5/25/2011	10:07:27 PM	H2 valve opened
5/25/2011	10:07:27 PM	Helium MFC set to  0.000000
5/25/2011	10:07:27 PM	H2 MFC set to  500.000000
5/25/2011	10:07:27 PM	BCl3 MFC set to  0.000000
5/25/2011	10:07:27 PM	PHl3 MFC set to  0.000000
5/25/2011	10:07:27 PM	SiCl4 MFC set to  0.000000
5/25/2011	10:07:27 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	10:07:27 PM	Tube furnace set to 0
5/25/2011	10:08:49 PM	Helium valve closed
5/25/2011	10:08:49 PM	BCl3 valve closed
5/25/2011	10:08:49 PM	PH3 valve closed
5/25/2011	10:08:49 PM	SiCl4 pre valve closed
5/25/2011	10:08:49 PM	SiCl4 post valve closed
5/25/2011	10:08:49 PM	Main Vac valve closed
5/25/2011	10:08:49 PM	Bypass valve closed
5/25/2011	10:08:49 PM	H2 valve opened
5/25/2011	10:08:49 PM	Bubbler valve opened
5/25/2011	10:08:49 PM	Helium MFC set to  0.000000
5/25/2011	10:08:49 PM	H2 MFC set to  500.000000
5/25/2011	10:08:49 PM	BCl3 MFC set to  0.000000
5/25/2011	10:08:49 PM	PHl3 MFC set to  0.000000
5/25/2011	10:08:49 PM	SiCl4 MFC set to  0.000000
5/25/2011	10:08:49 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	10:08:49 PM	Tube furnace set to 1000
5/25/2011	10:23:49 PM	Helium valve closed
5/25/2011	10:23:49 PM	BCl3 valve closed
5/25/2011	10:23:49 PM	PH3 valve closed
5/25/2011	10:23:49 PM	Main Vac valve closed
5/25/2011	10:23:49 PM	Bypass valve closed
5/25/2011	10:23:49 PM	H2 valve opened
5/25/2011	10:23:49 PM	SiCl4 pre valve opened
5/25/2011	10:23:49 PM	SiCl4 post valve opened
5/25/2011	10:23:49 PM	Bubbler valve opened
5/25/2011	10:23:49 PM	Helium MFC set to  0.000000
5/25/2011	10:23:49 PM	H2 MFC set to  500.000000
5/25/2011	10:23:49 PM	BCl3 MFC set to  0.000000
5/25/2011	10:23:49 PM	PHl3 MFC set to  0.000000
5/25/2011	10:23:49 PM	SiCl4 MFC set to  50.000000
5/25/2011	10:23:49 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	10:23:50 PM	Tube furnace set to 1000
5/25/2011	11:20:26 PM	H2 valve closed
5/25/2011	11:20:26 PM	BCl3 valve closed
5/25/2011	11:20:26 PM	PH3 valve closed
5/25/2011	11:20:26 PM	SiCl4 pre valve closed
5/25/2011	11:20:26 PM	SiCl4 post valve closed
5/25/2011	11:20:26 PM	Main Vac valve closed
5/25/2011	11:20:26 PM	Bypass valve closed
5/25/2011	11:20:26 PM	Helium valve opened
5/25/2011	11:20:26 PM	Bubbler valve opened
5/25/2011	11:20:26 PM	Helium MFC set to  500.000000
5/25/2011	11:20:26 PM	H2 MFC set to  0.000000
5/25/2011	11:20:26 PM	BCl3 MFC set to  0.000000
5/25/2011	11:20:26 PM	PHl3 MFC set to  0.000000
5/25/2011	11:20:26 PM	SiCl4 MFC set to  0.000000
5/25/2011	11:20:26 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	11:20:26 PM	Tube furnace set to 0
5/25/2011	11:40:26 PM	Helium valve closed
5/25/2011	11:40:26 PM	H2 valve closed
5/25/2011	11:40:26 PM	BCl3 valve closed
5/25/2011	11:40:26 PM	PH3 valve closed
5/25/2011	11:40:26 PM	SiCl4 pre valve closed
5/25/2011	11:40:26 PM	SiCl4 post valve closed
5/25/2011	11:40:26 PM	Main Vac valve closed
5/25/2011	11:40:26 PM	Bypass valve closed
5/25/2011	11:40:26 PM	Bubbler valve closed
5/25/2011	11:40:26 PM	Helium MFC set to  0.000000
5/25/2011	11:40:26 PM	H2 MFC set to  0.000000
5/25/2011	11:40:26 PM	BCl3 MFC set to  0.000000
5/25/2011	11:40:26 PM	PHl3 MFC set to  0.000000
5/25/2011	11:40:26 PM	SiCl4 MFC set to  0.000000
5/25/2011	11:40:26 PM	Bypass solenoid MFC set to  0.000000
5/25/2011	11:40:26 PM	Tube furnace set to 0
5/25/2011	11:40:26 PM	Run finished at 11:40 PM
